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신소재공학부

연구기자재
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시정소식 목록 - Deposition Equipment, Structural Analysis, Microscopes, Electrical/Magnetic/Optical, Lithography
Deposition Equipment
  • CVD : GaN MOCVD, ZnO MOCVD, UHVCVD, PECVD, PCVD
  • Evaporator : E-beam evaporator, Organic evaporator, Thermal evaporator
  • Sputters : Magnetron sputter, DC&RF sputter
Structural Analysis
  • Synchrotron x-ray beamline
  • Rotating anode x-ray generator
  • Small angle x-ray scattering
  • FT-NIMR, FT-IR
  • TGA/DSC, GC Mass
Microscopes
  • Atomic Force Microscope
  • Transmission Electron Microscope
  • Scanning Electron Microscope
Electrical/Magnetic/Optical
  • Magnetic Property Measurement System (MPMS)
  • Hall Measurement
  • Spectrum Analyzer
  • PL-Raman Spectrometer
  • UV-VIS Spectrometer
  • Coherent lnnova 300C Laser
  • Probe Station & Semiconductor Device Analyzer
Lithography
  • Nanoimprint Lithography System
  • E-beam Lithography System
  • Hologram Lithography System
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