| Deposition Equipment |
- CVD : GaN MOCVD, ZnO MOCVD, UHVCVD, PECVD, PCVD
- Evaporator : E-beam evaporator, Organic evaporator, Thermal evaporator
- Sputters : Magnetron sputter, DC&RF sputter
|
| Structural Analysis |
- Synchrotron x-ray beamline
- Rotating anode x-ray generator
- Small angle x-ray scattering
- FT-NIMR, FT-IR
- TGA/DSC, GC Mass
|
| Microscopes |
- Atomic Force Microscope
- Transmission Electron Microscope
- Scanning Electron Microscope
|
| Electrical/Magnetic/Optical |
- Magnetic Property Measurement System (MPMS)
- Hall Measurement
- Spectrum Analyzer
- PL-Raman Spectrometer
- UV-VIS Spectrometer
- Coherent lnnova 300C Laser
- Probe Station & Semiconductor Device Analyzer
|
| Lithography |
- Nanoimprint Lithography System
- E-beam Lithography System
- Hologram Lithography System
|
